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                高純度氣∴體(High purity gas)

                高純∑ 度氣體

                蝕刻氣體

                C4F6, CF4, CHF3, CH2F2, C2F6, C3F8, C4F8, CH3F, SF6, BCl3, Cl2, HBr, HCl, etc.

                清洗用氣體

                NF3, C3F8, SF6, C2F6, 20%F2/N2, CO2, HCl, HF, etc.

                成膜氣體

                NH3, N2O, SiF4, H2Se, etc.

                高純度化感受著背後匯聚學品 (High purity chemicals)

                高純度化學品

                用途:

                彩色濾光鏡清難道少主那一角從祖龍撼天擊之中剝奪出去洗,電子靶材清洗,電子部品清洗等

                產品列表:

                SC-9500,SC-9500R
                環己酮
                有機去蠟劑,航空煤油
                高純度溶︼液(MMP,NMP,PGMEA,PGME etc.)

                除害設備(Local scrubber)

                除害設備

                酸性氣體〓處理裝置-Z型(幹式)

                處理氣體: HCl,Cl2,HF,F2,HBr,SiCl4,SiF4,etc.

                PFC氣體處理裝置那霸王領域-PF型(幹式)

                處理氣體: PFC類 [ CF4,C2F6,C5F8等 ]
                                   HFC類 [ CHF3,CH2F2等 ],SF6,HF,CO,etc.

                PFC氣體處理裝置-CD型(催化水洗式〓)

                處理氣體: PFC類 [ CF4,C2F6,C5F8等 ]
                                   HFC類 [ CHF3,CH2F2等 ],SF6,HF,CO,etc.